Optimization of a gas Jet-type Z-pinch discharge EUV light source

Publication Information

Title

Japanese:
English:	Optimization of a gas Jet-type Z-pinch discharge EUV light source

Author

Japanese:	Naoya Iizuka, Nozomu Kishi, Inho Song, Toshiro Sakamoto, Yasunori Kobayashi, Smruti R. Mohanty, Masato Watanabe, Akitoshi Okino, Eiki Hotta.
English:	Naoya Iizuka, Nozomu Kishi, Inho Song, Toshiro Sakamoto, Yasunori Kobayashi, Smruti R. Mohanty, Masato Watanabe, Akitoshi Okino, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 22nd ISDEIV

Volume, Number, Page

pp. 630-633

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	22nd International Symposium on Discharges and Electrical Insulation in Vacuum

Conference site

Japanese:
English:	Matsue, Japan

DOI