Comparative study on the performance of a xenon capillary Z-pinch EUV lithography light source using a pinhole camera

Publication Information

Title

Japanese:
English:	Comparative study on the performance of a xenon capillary Z-pinch EUV lithography light source using a pinhole camera

Author

Japanese:	Inho Song, Kazuhiko Iwata, Yusuke Homma, Smruti R Mohanty, Masato Watanabe, Toru Kawamura, Akitoshi Okino, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta.
English:	Inho Song, Kazuhiko Iwata, Yusuke Homma, Smruti R Mohanty, Masato Watanabe, Toru Kawamura, Akitoshi Okino, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	Plasma Sources Science and Technology

Volume, Number, Page

Vol. 15 pp. 322-327

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: