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Title
Japanese:SBSI技術による極薄SOI/BOX層の形成 
English: 
Author
Japanese: 矢橋健一, 野武幸輝, 大見俊一郎.  
English: 矢橋健一, 野武幸輝, 大見俊一郎.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page Vol. 2        pp. 779
Published date Aug. 2006 
Publisher
Japanese: 
English: 
Conference name
Japanese:第67回応用物理学会学術講演会講演予稿集 
English: 
Conference site
Japanese:立命館大学 
English: 

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