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Title
Japanese:HfNのECRプラズマ酸化によるHfON薄膜の形成 
English: 
Author
Japanese: 大見俊一郎, 黒瀬朋紀, 佐藤雅樹.  
English: 大見俊一郎, 黒瀬朋紀, 佐藤雅樹.  
Language Japanese 
Journal/Book name
Japanese:電子情報通信学会技術研究報告 
English: 
Volume, Number, Page Vol. 106    No. 108    pp. 93-97
Published date June 2006 
Publisher
Japanese: 
English: 
Conference name
Japanese:電子情報通信学会SDM研究会 
English: 
Conference site
Japanese:広島大学 
English: 

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