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Title
Japanese:ECRプラズマプロセスによる高誘電率ゲート絶縁膜の形成 
English: 
Author
Japanese: 大見俊一郎.  
English: 大見俊一郎.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 14-19
Published date Sept. 2006 
Publisher
Japanese: 
English: 
Conference name
Japanese:電気学会電子・情報・システム部門大会講演論文集 
English: 
Conference site
Japanese:関東学院大学 
English: 

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