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Title
Japanese:Pt/HfOxNy/Si(100)ゲート積層構造の形成とPMA条件の検討 
English: 
Author
Japanese: 佐藤雅樹, 仲野雄介, 大見俊一郎.  
English: 佐藤雅樹, 仲野雄介, 大見俊一郎.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page Vol. 2        pp. 715
Published date Aug. 2006 
Publisher
Japanese: 
English: 
Conference name
Japanese:第67回応用物理学会学術講演会講演予稿集 
English: 
Conference site
Japanese:立命館大学 
English: 

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