High Rate Reactive Facing Targets Sputtering for Deposition of Mn-Zn Spinel Ferrite Thin Films

Publication Information

Title

Japanese:
English:	High Rate Reactive Facing Targets Sputtering for Deposition of Mn-Zn Spinel Ferrite Thin Films

Author

Japanese:	S. Nakagawa*, S. Saito, T. Kamiki, M. Naoe.
English:	S. Nakagawa*, S. Saito, T. Kamiki, M. Naoe.

Language

English

Journal/Book name

Japanese:
English:	Abstracts of ICF9

Volume, Number, Page

pp. ICF9-CB-6-2004

Published date

Aug. 2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:	9th International Conference on Ferrites (ICF 9)

Conference site

Japanese:
English:	San Francisco, California, USA