Development of RF-Facing Targets Sputtering System for Deposition of Oxide Films

Publication Information

Title

Japanese:
English:	Development of RF-Facing Targets Sputtering System for Deposition of Oxide Films

Author

Japanese:	Mitsuru Nagasawa, Keisuke Matsuno, Shigeki Nakagawa.
English:	Mitsuru Nagasawa, Keisuke Matsuno, Shigeki Nakagawa.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 8th International Symposium on Sputtering & Plasma Processes

Volume, Number, Page

pp. TF 3-4

Published date

June 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	8th International Symposium on Sputtering & Plasma Processes (ISSP2005)

Conference site

Japanese:
English:	Kanazawa, Ishikawa, Japan