RF-Facing Targets Sputtering System for Deposition of Oxide Thin Films

Publication Information

Title

Japanese:
English:	RF-Facing Targets Sputtering System for Deposition of Oxide Thin Films

Author

Japanese:	Mitsuru Nagasawa, Kazuhiro TAMAI, Koji Nomura, Yuji Murashima, Shigeki Nakagawa.
English:	Mitsuru Nagasawa, Kazuhiro TAMAI, Koji Nomura, Yuji Murashima, Shigeki Nakagawa.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of ICCE-14

Volume, Number, Page

Vol. 2c No. OXIDE 1 pp. 6

Published date

July 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	14th Annual International Conference on Composites/Nano Engineering (ICCE-14)

Conference site

Japanese:
English:	Boulder, Colorado, USA