Characterization of amorphous carbon films deposited by surface wave plasma CVD

Publication Information

Title

Japanese:
English:	Characterization of amorphous carbon films deposited by surface wave plasma CVD

Author

Japanese:	Hiroki Akasaka, Naoto Ohtake.
English:	Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	Diamond and Related Materials

Volume, Number, Page

Vol. 11 No. 11-12 pp. 1828-1831

Published date

Nov. 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI