Ring-Like Craters in Single-Crystal Si, Ge, and GaAs by Deuterium-Ion Implantation | Science Tokyo Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Ring-Like Craters in Single-Crystal Si, Ge, and GaAs by Deuterium-Ion Implantation

Author

Japanese:	Y. Tagishi, 片渕竜也.
English:	Y. Tagishi, T. Katabuchi.

Language

English

Journal/Book name

Japanese:
English:	Physics Letters A

Volume, Number, Page

Vol. 195 pp. 99-104

Published date

1994

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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