分光特性を用いたマイクロ波放電プラズマの電子エネルギー分布関数の評価

Publication Information

Title

Japanese:	分光特性を用いたマイクロ波放電プラズマの電子エネルギー分布関数の評価
English:	Evaluation of EEDF of Microwave Discharge Plasmas by Sectroscopic Characteristics

Author

Japanese:	水落純, 松浦治明, 赤塚洋.
English:	J. Mizuochi, H. Matsuura, H. Akatsuka.

Language

Japanese

Journal/Book name

Japanese:	第５４回応用物理学関係連合講演会　講演予稿集
English:	Extended Abstracts (The 54th Spring Meeting, 2007); The Japan Society of Applied Physics and Related Societies

Volume, Number, Page

pp. 175

Published date

Mar. 2007

Publisher

Japanese:
English:

Conference name

Japanese:	第５４回応用物理学関係連合講演会
English:

Conference site

Japanese:	青山学院大
English: