大気圧非平衡マイクロ波放電プラズマジェットの発光分光計測と表面改質プロセスの相関

Publication Information

Title

Japanese:	大気圧非平衡マイクロ波放電プラズマジェットの発光分光計測と表面改質プロセスの相関
English:	Optical Emission Spectroscopy and Correlation on Surface Treatment for Processing by Atmospheric Pressure Non-Equilibrium Microwave Discharge Plasma Jets

Author

Japanese:	湯地敏史, 藤岡万也, 藤井修逸, 福山紅陽, 赤塚洋.
English:	T. Yuji, K. Fujioka, S. Fujii, K. Fukuyama, H. Akatsuka.

Language

Japanese

Journal/Book name

Japanese:	プラズマ応用科学
English:

Volume, Number, Page

Vol. 14 pp. 139-142

Published date

Dec. 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: