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Title
Japanese:Ge上極薄Siのプラズマ酸化によるSiO2/Ge MISキャパシタの電気特性 
English: 
Author
Japanese: 熊谷寛, 七条真人, 松原寛, 菅原聡, 内田恭敬, 高木信一.  
English: 熊谷寛, 七条真人, 松原寛, SATOSHI SUGAHARA, 内田恭敬, 高木信一.  
Language Japanese 
Journal/Book name
Japanese:第54回応用物理学関係連合講演会 
English: 
Volume, Number, Page         p. 30a-ZH-9
Published date Mar. 2007 
Publisher
Japanese: 
English: 
Conference name
Japanese:第54回応用物理学関係連合講演会, 相模原, 
English: 
Conference site
Japanese: 
English: 

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