Vacuum Arc Deposition of Homogeneous Amorphous Carbon Films at High Growth Rates

Publication Information

Title

Japanese:
English:	Vacuum Arc Deposition of Homogeneous Amorphous Carbon Films at High Growth Rates

Author

Japanese:	Mutsumi Horikoshi, 平田敦.
English:	Mutsumi Horikoshi, Atsushi Hirata.

Language

English

Journal/Book name

Japanese:
English:	New Diamond and Frontier Carbon Technology

Volume, Number, Page

Vol. 16 No. 5 pp. 267-277

Published date

Dec. 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: