Mechanical Properties of DLC Film Prepared by Ion Beam Sputtering with Electron Beam Excited Plasma | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Mechanical Properties of DLC Film Prepared by Ion Beam Sputtering with Electron Beam Excited Plasma

Author

Japanese:	平田敦.
English:	ATSUSHI HIRATA.

Language

English

Journal/Book name

Japanese:
English:	Abstract Book of Diamond 2000

Volume, Number, Page

pp. 15.11.03

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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