Characterization of atmospheric pressure radio-frequency discharge and application to carbon nanotubes deposition

Publication Information

Title

Japanese:
English:	Characterization of atmospheric pressure radio-frequency discharge and application to carbon nanotubes deposition

Author

Japanese:	野崎智洋, Tomoya Goto, Ken Okazaki.
English:	Tomohiro Nozaki, Tomoya Goto, Ken Okazaki.

Language

English

Journal/Book name

Japanese:
English:	第15回日本MRS学術シンポジウム

Volume, Number, Page

Vol. 1 No. - pp. -

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	日本大学