Emissivity and Opacity of Xe and Sn Based on a Detailed Atomic Model

Publication Information

Title

Japanese:
English:	Emissivity and Opacity of Xe and Sn Based on a Detailed Atomic Model

Author

Japanese:	A.Sasaki, K.Nishihara, A.Sunahara, K.Gamada, T.Nishikawa, K.Fujima, T.Kawamura, F.Koike, T.Kagawa, R.More, T.Kato.
English:	A.Sasaki, K.Nishihara, A.Sunahara, K.Gamada, T.Nishikawa, K.Fujima, T.Kawamura, F.Koike, T.Kagawa, R.More, T.Kato.

Language

English

Journal/Book name

Japanese:
English:	3rd International Extreme UltraViolet Lithography Symposium, Miyazaki, Japan, 1-4 November, 2004.

Volume, Number, Page

Vol. http://www.sematech.org/

Published date

Nov. 2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:	3rd International Extreme UltraViolet Lithography Symposium, Miyazaki, Japan, 1-4 November, 2004.

Conference site

Japanese:
English:	Miyazaki, Japan, 1-4 November, 2004.