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Title
Japanese:せり上げPtSi-SALICIDEにおける選択エッチングプロセスの検討 
English: 
Author
Japanese: 大熊直樹, 澤熊悠, 大見俊一郎.  
English: 大熊直樹, 澤熊悠, 大見俊一郎.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page Vol. 2        pp. 899
Published date Mar. 2006 
Publisher
Japanese: 
English: 
Conference name
Japanese:第53回応用物理学関係連合講演会講演予稿集 
English: 
Conference site
Japanese:武蔵工大 
English: 

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