Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition

Publication Information

Title

Japanese:
English:	Design and development of an ultra-compact drum-shaped chamber for combinatorial pulsed laser deposition

Author

Japanese:	M. Katayama, K. Itaka, Y. Matsumoto, H. Koinuma.
English:	M. Katayama, K. Itaka, Y. Matsumoto, H. Koinuma.

Language

English

Journal/Book name

Japanese:
English:	Appl. Surf. Sci.

Volume, Number, Page

Vol. 252 pp. 2461-2465

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI