A Newly Developed Compact Nano-Positioning Table System Using Squeeze Bearing

Publication Information

Title

Japanese:
English:	A Newly Developed Compact Nano-Positioning Table System Using Squeeze Bearing

Author

Japanese:	後閑利通, 吉岡勇人, 新野秀憲.
English:	Toshimichi GOKAN, Hayato YOSHIOKA, Hidenori SHINNO.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 4th International conference on Leading Edge Manufacturing in 21st Century(LEM21)

Volume, Number, Page

Vol. 07 No. 205 pp. 177-180

Published date

Nov. 2007

Publisher

Japanese:
English:	The Japan Society of Mechanical Engineers(JSME)

Conference name

Japanese:
English:	The 4th International conference on Leading Edge Manufacturing in 21st Century(LEM21)

Conference site

Japanese:
English:	Fukuoka