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Title
Japanese:先端デバイス材料ハンドブック（分担） 
English: 
Author
Japanese: 水本哲弥.  
English: Tetsuya MIZUMOTO.  
Language Japanese 
Journal/Book name
Japanese:オーム社 
English: 
Volume, Number, Page         pp. 566-570
Published date May 1993 
Publisher
Japanese:オーム社 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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