レーザーアシストを用いたEUV光源の開発

Publication Information

Title

Japanese:	レーザーアシストを用いたEUV光源の開発
English:	Development of Discharge EUV Light Source Assisted by laser

Author

Japanese:	山田淳三郎, 岸望, 渡邊正人, 沖野晃俊, 河村徹, 堀岡一彦, 堀田栄喜.
English:	Junzaburo Yamada, Nozomu Kishi, MASATO WATANABE, AKITOSHI OKINO, Tohru Kawamura, KAZUHIKO HORIOKA, EIKI HOTTA.

Language

Japanese

Journal/Book name

Japanese:	電気学会研究会資料
English:	The Papers of Technical Meeting on Pulsed Power Technology

Volume, Number, Page

Vol. PPT-07-38～47 pp. 29-33

Published date

Nov. 2007

Publisher

Japanese:	電気学会
English:	IEE Japan

Conference name

Japanese:	パルスパワー研究会
English:	Meeting on Pulsed Power Technology

Conference site

Japanese:	東京
English:	Tokyo