Extreme-ultraviolet Intensity of Discharge-based Lithium Plasma for Lithography

Publication Information

Title

Japanese:
English:	Extreme-ultraviolet Intensity of Discharge-based Lithium Plasma for Lithography

Author

Japanese:	MASNAVIMAJID, 中島充夫, 河村徹, 堀田栄喜, 堀岡一彦.
English:	majid masnavi, MITSUO NAKAJIMA, Tohru Kawamura, EIKI HOTTA, KAZUHIKO HORIOKA.

Language

English

Journal/Book name

Japanese:	電気学会研究会資料
English:	The Papers of Technical Meeting on Pulsed Power technology

Volume, Number, Page

Vol. PPT-07-38～47 pp. 35-40

Published date

Nov. 2007

Publisher

Japanese:	電気学会
English:	IEE Japan

Conference name

Japanese:	パルスパワー研究会
English:	Technical Meeting on Pulsed Power Technology

Conference site

Japanese:	東京
English:	Tokyo