磁場ガイド放電プラズマを用いた長パルスEUV光源

Publication Information

Title

Japanese:	磁場ガイド放電プラズマを用いた長パルスEUV光源
English:	Long Pulse EUV SOurce using Discharge Produced Plasma Guided by a Magnetic Field

Author

Japanese:	寺田健, 中島充夫, 河村徹, 細貝知直, 堀田栄喜, 堀岡一彦.
English:	Takeshi Terada, MITSUO NAKAJIMA, Tohru Kawamura, Tomonao Hosokai, EIKI HOTTA, KAZUHIKO HORIOKA.

Language

Japanese

Journal/Book name

Japanese:	電気学会研究会資料
English:	The Papers of Technical Meeting on Pulsed Power Technology

Volume, Number, Page

Vol. PPT-07-38～47 pp. 41-45

Published date

Nov. 2007

Publisher

Japanese:	電気学会
English:	IEE Japan

Conference name

Japanese:	パルスパワー研究会
English:	Technical Meeting on Pulsed Power Technology

Conference site

Japanese:	東京
English:	Tokyo