Experimental Database of LPP EUV Sources at ILE and ILT

Publication Information

Title

Japanese:
English:	Experimental Database of LPP EUV Sources at ILE and ILT

Author

Japanese:	N.Miyanaga, H.Nishimura, T.Norimatsu, K.Nishihara, M.Nakai, K.Nagai, K.Shigemori, S.Fujioka, Y.Tao, Q.Gu, T.Okuno, N.Ueda, M.Nakatsuka, H.Fujita, K.Tsubakimoto, Y.Fujimoto, H.Yoshida, M.Murakami, Y-G.Kang, K.Gamada, S.Uchida, M.Yamaura, Y.Shimada, K.Hashimoto, A.Sunahara, H.Furukawa, T.Kawamura, T.Nishikawa, Y.Izawa.
English:	N.Miyanaga, H.Nishimura, T.Norimatsu, K.Nishihara, M.Nakai, K.Nagai, K.Shigemori, S.Fujioka, Y.Tao, Q.Gu, T.Okuno, N.Ueda, M.Nakatsuka, H.Fujita, K.Tsubakimoto, Y.Fujimoto, H.Yoshida, M.Murakami, Y-G.Kang, K.Gamada, S.Uchida, M.Yamaura, Y.Shimada, K.Hashimoto, A.Sunahara, H.Furukawa, T.Kawamura, T.Nishikawa, Y.Izawa.

Language

English

Journal/Book name

Japanese:
English:	3rd International Extreme UltraViolet Lithography Symposium, Miyazaki, Japan, 1-4 November, 2004.

Volume, Number, Page

Vol. http://www.sematech.org/

Published date

Nov. 2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:	3rd International Extreme UltraViolet Lithography Symposium, Miyazaki, Japan, 1-4 November, 2004.

Conference site

Japanese:
English:	Miyazaki, Japan, 1-4 November, 2004.