Distribution of Excited States of Hydrogen in Microwave Discharge Hydrogen Plasma

Publication Information

Title

Japanese:	マイクロ波放電水素プラズマの水素原子分子の励起状態分布
English:	Distribution of Excited States of Hydrogen in Microwave Discharge Hydrogen Plasma

Author

Japanese:	清水良浩, 橘高勇介, 松浦治明, 根津篤, 赤塚洋.
English:	Yoshihiro Shimizu, yuusuke kittaka, HARUAKI MATSUURA, Atsushi Nezu, HIROSHI AKATSUKA.

Language

English

Journal/Book name

Japanese:	第２５回プラズマプロセシング研究会プロシーディングス
English:	Proc. The 25th Symposium on Plasma Processing (SPP-25)

Volume, Number, Page

pp. 101-102

Published date

Jan. 2008

Publisher

Japanese:	応用物理学会プラズマエレクトロニクス分科会
English:	Organizinng Committee of SPP-25

Conference name

Japanese:	第２５回プラズマプロセシング研究会
English:	The 25th Symposium on Plasma Processing (SPP-25)

Conference site

Japanese:	山口県教育会館
English:	Education Hall of Yamaguchi Prefecture

Official URL