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Title
Japanese:酸素プラズマによる表面処理を用いたInP-Si常温ダイレクトボンディング 
English: 
Author
Japanese: 武井, 水本.  
English: Ryouhei Takei, Tetsuya MIZUMOTO.  
Language Japanese 
Journal/Book name
Japanese:2007年秋季第68回応用物理学会講演会講演概要 
English: 
Volume, Number, Page         pp. 4p-P3-25
Published date Sept. 2007 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
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Conference site
Japanese: 
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