パルス変調によるヘリウム誘導結合プラズマの生成とその特性測定

Publication Information

Title

Japanese:	パルス変調によるヘリウム誘導結合プラズマの生成とその特性測定
English:	Generation and characteristiocs of a pulse-modulated helium inductively coupled plasma

Author

Japanese:	薮田泰伸, 宮原秀一, 渡邊正人, 沖野晃俊, 堀田栄喜.
English:	薮田泰伸, hidekadzu miyahara, MASATO WATANABE, AKITOSHI OKINO, EIKI HOTTA.

Language

Japanese

Journal/Book name

Japanese:	分析化学
English:	BUNSEKI KAGAKU

Volume, Number, Page

Vol. 51 No. 2 pp. 105-110

Published date

Feb. 1, 2002

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
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DOI