Effects of Supercritical CO2 on Adhesive Strength between Micro-sized Photoresist pattern and Si Substrate

Publication Information

Title

Japanese:
English:	Effects of Supercritical CO2 on Adhesive Strength between Micro-sized Photoresist pattern and Si Substrate

Author

Japanese:	石山千恵美, 柴田曉伸, 曽根正人, 肥後矢吉.
English:	Chiemi Ishiyama, Akinobu Shibata, Masato Sone, Yakichi Higo.

Language

English

Journal/Book name

Japanese:
English:	Material Research Society

Volume, Number, Page

pp. DD6.26

Published date

Nov. 2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2007 MRS Fall Meeting

Conference site

Japanese:
English:	Hynes Convention Center and Sheraton Boston Hotel, Boston, MA