レーザトリガ型EUV放電光源の開発

Publication Information

Title

Japanese:	レーザトリガ型EUV放電光源の開発
English:	Development of Laser-triggered Light Source for EUV Lithography

Author

Japanese:	渡邊正人, 岸望, 山田淳三郎, 堀田栄喜.
English:	MASATO WATANABE, Nozomu Kishi, Junzaburo Yamada, EIKI HOTTA.

Language

Japanese

Journal/Book name

Japanese:	平成２０年電気学会全国大会講演論文集
English:	The 2008 Annual Meeting Record

Volume, Number, Page

Vol. 1 p. 60

Published date

Mar. 2008

Publisher

Japanese:	電気学会
English:	IEE Japan

Conference name

Japanese:	平成２０年電気学会全国大会
English:	The 2008 Annual Meeting IEE Japan

Conference site

Japanese:	福岡
English:	Fukuoka