“(111)-Oriented SrRuO3/Pt Bottom Electrode for Reproducible Preparation of Metal Organic Chemical Vapor Dposited Pb(Zr, Ti)O3 Films for High Density Ferroclectric Random Access Memories”,

Publication Information

Title

Japanese:	“高密度強誘電体メモリ用のMOCVD合成Pb(Zr, Ti)O3の高再現性作成のための(111)配向したSrRuO3/Pt下部電極”
English:	“(111)-Oriented SrRuO3/Pt Bottom Electrode for Reproducible Preparation of Metal Organic Chemical Vapor Dposited Pb(Zr, Ti)O3 Films for High Density Ferroclectric Random Access Memories”,

Author

Japanese:	ニコラス・メヌー, 桑原裕紀, 舟窪浩.
English:	Nicolas Menou, Hiroki Kuwabara, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:	社団法人電子情報通信学会, 信学技報,
English:	IEICE Technical Report

Volume, Number, Page

Vol. 106 No. 593 pp. 21-26

Published date

2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Abstract

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