“Low-Temperature Preparation of Metallic Ruthenium Films by MOCVD Using Bis(2,4-dimethylpentadienyl)ruthenium”

Publication Information

Title

Japanese:
English:	“Low-Temperature Preparation of Metallic Ruthenium Films by MOCVD Using Bis(2,4-dimethylpentadienyl)ruthenium”

Author

Japanese:	河野和久, Hiroaki Kosuge, Noriaki Oshima, 舟窪浩.
English:	Kazuhisa Kawano, Hiroaki Kosuge, Noriaki Oshima, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Electrochem. Solid-State Lett.

Volume, Number, Page

Vol. 10 No. 6 pp. D60-D62

Published date

2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Abstract

null