“Effect of source materials on film thickness and compositional uniformity of MOCVD-P(Zr,Ti)O3 films”

Publication Information

Title

Japanese:
English:	“Effect of source materials on film thickness and compositional uniformity of MOCVD-P(Zr,Ti)O3 films”

Author

Japanese:	舟窪浩, Atsushi Nagai, Gouji Asano, June-Mo Koo, Sang-Min Shin, Youngsoo Park.
English:	Hiroshi Funakubo, Atsushi Nagai, Gouji Asano, June-Mo Koo, Sang-Min Shin, Youngsoo Park.

Language

English

Journal/Book name

Japanese:
English:	Surface & Coatings Technology,

Volume, Number, Page

Vol. 201 pp. 9279–9284

Published date

2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: