“RF Magnetron Sputtering Growth of Epitaxial SrRuO3 Films with High Conductivity”

Publication Information

Title

Japanese:
English:	“RF Magnetron Sputtering Growth of Epitaxial SrRuO3 Films with High Conductivity”

Author

Japanese:	加茂嵩史, 西田謙, 秋山賢輔, Joe Sakai, 河東田隆, 舟窪浩.
English:	Takafumi Kamo, Ken Nishida, Kensuke Akiyama, Joe Sakai, Takashi Katoda, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 46 No. 10B pp. 6987-6990.

Published date

2007

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: