Effects of Supercritical Carbon Dioxide on Adhesive Strength between Micro-sized Photoresists and Silicon Substrates

Publication Information

Title

Japanese:
English:	Effects of Supercritical Carbon Dioxide on Adhesive Strength between Micro-sized Photoresists and Silicon Substrates

Author

Japanese:	石山千恵美, 柴田曉伸, 曽根正人, 肥後矢吉.
English:	Chiemi Ishiyama, Akinobu Shibata, Masato Sone, Yakichi Higo.

Language

English

Journal/Book name

Japanese:
English:	Microelectromechanical Systems--Materials and Devices, MRS symposium Proceedings

Volume, Number, Page

Vol. 1052 pp. 217-222

Published date

Nov. 2007

Publisher

Japanese:
English:	Materials Research Society

Conference name

Japanese:
English:	2007 MRS Fall Meeting

Conference site

Japanese:
English:	Hynes Convention Center and Sheraton Boston Hotel, Boston, MA