Fabrication of high-performance on-die passives based on multi-Cu-layer WLP processes

Publication Information

Title

Japanese:
English:	Fabrication of high-performance on-die passives based on multi-Cu-layer WLP processes

Author

Japanese:	Kazuhisa Itoi, Masakazu Sato, Hiroshi Abe, Takuya Aizawa, Oasmu Nakao, Takashi Takizawa, 岡田健一, 益一哉, Tatsuya Ito.
English:	Kazuhisa Itoi, Masakazu Sato, Hiroshi Abe, Takuya Aizawa, Oasmu Nakao, Takashi Takizawa, Kenichi Okada, Kazuya Masu, Tatsuya Ito.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2005

Publisher

Japanese:
English:

Conference name

Japanese:	International Wafer-Level Packaging Congress
English:

Conference site

Japanese:	San Jose, CA
English: