Performance of a Gas Jet Type Z-Pinch EUV Light Source

Publication Information

Title

Japanese:
English:	Performance of a Gas Jet Type Z-Pinch EUV Light Source

Author

Japanese:	宋仁皓, 小林靖典, 坂本敏郎, Smruti R. Mohanty, 渡邊正人, 沖野晃俊, 河村徹, 安岡康一, 堀岡一彦, 堀田栄喜.
English:	Inho Song, Yasunori Kobayashi, Toshiro Sakamoto, Smruti R. Mohanty, Masato Watanabe, Akitoshi Okino, Tohru Kawamura, Koichi Yasuoka, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	31st International Conference on Micro- Nano-Engineering

Volume, Number, Page

pp. 3-b-05

Published date

Sept. 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference on Miro- and Nano-Engineering

Conference site

Japanese:
English:	Vienna, Austria