Optimization of a gas jet-type Z-pinch discharge EUV light source

Publication Information

Title

Japanese:
English:	Optimization of a gas jet-type Z-pinch discharge EUV light source

Author

Japanese:	飯塚直哉, 坂本敏郎, 小林靖典, 宋仁皓, Smruti R. Mohanty, 渡邊正人, 沖野晃俊, 堀田栄喜.
English:	Naoya Iizuka, Toshiro Sakamoto, Yasunori Kobayashi, Inho Song, Smruti R. Mohanty, Masato Watanabe, AKITOSHI OKINO, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

May 2006

Publisher

Japanese:	日本分光学会
English:

Conference name

Japanese:	平成18年度日本分光学会春季講演会・シンポジウム
English:

Conference site

Japanese:	東京
English: