同軸二重ノズル型電極を用いたEUV光源の出力特性

Publication Information

Title

Japanese:	同軸二重ノズル型電極を用いたEUV光源の出力特性
English:

Author

Japanese:	岸望, 飯塚直哉, 坂本敏郎, 宋仁皓, 小林靖典, S.R. Mohanty, 渡辺正人, 沖野晃俊, 堀田栄喜.
English:	Nozomu Kishi, Naoya Iizuka, Toshiro Sakamoto, INHO SONG, Yasunori Kobayashi, S.R. Mohanty, MASATO WATANABE, AKITOSHI OKINO, EIKI HOTTA.

Language

Japanese

Journal/Book name

Japanese:	平成１８年電気学会基礎・材料・共通部門大会（CD-ROM)
English:

Volume, Number, Page

pp. 259

Published date

Aug. 2006

Publisher

Japanese:
English:

Conference name

Japanese:	平成１８年電気学会基礎・材料・共通部門大会
English:

Conference site

Japanese:	熊本市
English: