集束イオンビームによる硬ぜい性材料のナノ加工に関する研究

Publication Information

Title

Japanese:	集束イオンビームによる硬ぜい性材料のナノ加工に関する研究
English:	Study on Nano-Machining of Hard and Brittle Material with Focused Ion Beam

Author

Japanese:	高橋信彦, 吉岡勇人, 新野秀憲.
English:	Nobuhiko TAKAHASHI, Hayato YOSHIOKA, Hidenori SHINNO.

Language

Japanese

Journal/Book name

Japanese:	精密工学会誌
English:	Journal of the Japan Society for Precision Engineering

Volume, Number, Page

Vol. 74 No. 5 pp. 491-497

Published date

May 2008

Publisher

Japanese:	精密工学会
English:	Journal of the Japan Society for Precision Engineering

Conference name

Japanese:
English:

Conference site

Japanese:
English: