超精密加工用リニアモータ駆動空気静圧XY平面運動テーブルシステム

Publication Information

Title

Japanese:	超精密加工用リニアモータ駆動空気静圧XY平面運動テーブルシステム
English:	Linear Motor-driven Aerostatic X-Y Planar Motion Table System for Nano-machining

Author

Japanese:	新野秀憲, 吉岡勇人.
English:	Hidenori SHINNO, Hayato YOSHIOKA.

Language

Japanese

Journal/Book name

Japanese:	日本機械学会C229 多軸工作機械における先進技術に関する研究分科会研究報告書
English:	JSME Research Committee on Advanced Technologies for Multi-axis Machine Tools

Volume, Number, Page

pp. 23-28

Published date

June 2008

Publisher

Japanese:	日本機械学会
English:	The Japan Society of Mechanical Engineers

Conference name

Japanese:
English:

Conference site

Japanese:
English: