RIE-plasma Induced Optical Property Degradation in GaInAsP/InP Quantum-Well Structures

Publication Information

Title

Japanese:
English:	RIE-plasma Induced Optical Property Degradation in GaInAsP/InP Quantum-Well Structures

Author

Japanese:	黒川宗高, Plum Wongrot Dhanorm, 小沢浩二, 丸山武男, 西山伸彦, 荒井滋久.
English:	Munetaka Kurokawa, Plum Wongrot Dhanorm, Koji Ozawa, Takeo Maruyama, Nobuhiko Nishiyama, Shigehisa Arai.

Language

English

Journal/Book name

Japanese:
English:	Digest of IPRM2008

Volume, Number, Page

No. WeP39

Published date

May 2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 20th International Conference on Indium Phosphide and Related Materials (IPRM2008)

Conference site

Japanese:
English:	Versaille, France

DOI