(Invited) Low temperature direct bonding and its application to photonic devices

Publication Information

Title

Japanese:
English:	(Invited) Low temperature direct bonding and its application to photonic devices

Author

Japanese:	水本, 武井, 庄司, 櫻井.
English:	T.Mizumoto, R. Takei, Y. Shoji, K. Sakurai.

Language

English

Journal/Book name

Japanese:
English:	Conference Abstract of The 214th Meeting of Electrochemical Society

Volume, Number, Page

2042

Published date

Oct. 2008

Publisher

Japanese:
English:	Electro Chemical Society

Conference name

Japanese:
English:	Conference Abstract of The 214th Meeting of Electrochemical Society

Conference site

Japanese:
English:	Honolulu, Hawaii