Improvement of Bond strength between Micro-sized photoresist components and silicon substrate usingsupercritical carbon dioxide cleaning

Publication Information

Title

Japanese:
English:	Improvement of Bond strength between Micro-sized photoresist components and silicon substrate usingsupercritical carbon dioxide cleaning

Author

Japanese:	石山千恵美, 柴田曉伸, 曽根正人, 肥後矢吉.
English:	Chiemi Ishiyama, Akinobu Shibata, Masato Sone, Yakichi Higo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:	34th International Micro - Nano Engineering Conference (MNE 2008), 15-18 September 2008

Conference site

Japanese:
English:	Athens - Greece