MEMS用微小レジスト構造部材－基板間の接合強度に及ぼす膜厚の影響

Publication Information

Title

Japanese:	MEMS用微小レジスト構造部材－基板間の接合強度に及ぼす膜厚の影響
English:	Effects of Resist film thickness on Bond Strength between Micro-sized Resist components and a substrate

Author

Japanese:	石山千恵美, 柴田曉伸, 曽根正人, 肥後矢吉.
English:	CHIEMI ISHIYAMA, Akinobu Shibata, Masato Sone, YAKICHI HIGO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 2008

Publisher

Japanese:
English:

Conference name

Japanese:	機械学会2008年
English:

Conference site

Japanese:	横浜国大
English: