Vertical Nano-Positioning Stage with Noncontact Gravity Compensator

Publication Information

Title

Japanese:
English:	Vertical Nano-Positioning Stage with Noncontact Gravity Compensator

Author

Japanese:	新野秀憲, Motohiro TAKAHASHI, 吉岡勇人.
English:	Hidenori SHINNO, Motohiro TAKAHASHI, Hayato YOSHIOKA.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of the 13th International Machine Tool Engineers' Conference, October 30th to November 4th, 2008

Volume, Number, Page

pp. 64-65

Published date

Nov. 2008

Publisher

Japanese:
English:	Japan Machine Tool Builders' Association

Conference name

Japanese:
English:	The 13th International Machine Tool Engineers' Conference

Conference site

Japanese:
English:	Tokyo Big Sight