Defect passivation and homogenization of amorphous oxide thin-film transistor by wet O2 annealing

Publication Information

Title

Japanese:
English:	Defect passivation and homogenization of amorphous oxide thin-film transistor by wet O2 annealing

Author

Japanese:	Kenji Nomura, 神谷利夫, Hiromichi Ohta, Masahiro Hirano, 細野秀雄.
English:	Kenji Nomura, Toshio Kamiya, Hiromichi Ohta, Masahiro Hirano, Hideo Hosono.

Language

English

Journal/Book name

Japanese:
English:	Appl. Phys. Lett.

Volume, Number, Page

Vol. 93 pp. 192107-1～192107-3

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI