Thermal stability of UBM sputtered DLC coatings with various hydrogen contents | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Thermal stability of UBM sputtered DLC coatings with various hydrogen contents

Author

Japanese:	伊藤弘高, 山本兼司, 益子正文.
English:	Hirotaka Ito, Kenji Yamamoto, Masabumi Masuko.

Language

English

Journal/Book name

Japanese:
English:	Thin Solid Films

Volume, Number, Page

Vol. 517 pp. 1115-1119

Published date

Dec. 2008

Publisher

Japanese:
English:	Elsevier

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI

https://doi.org/10.1016/j.tsf.2008.08.163

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