Metallization on polymer via quantitatively controlled catalyzation in Sc-CO2 and electroless plating with Sc-CO2 emulsion for micro and nano device

Publication Information

Title

Japanese:
English:	Metallization on polymer via quantitatively controlled catalyzation in Sc-CO2 and electroless plating with Sc-CO2 emulsion for micro and nano device

Author

Japanese:	WOO BYUNG HOON, 曽根正人, 柴田曉伸, 石山千恵美, Kaoru Masuda, 肥後矢吉.
English:	Byung-Hoon Woo, Masato Sone, Akinobu Shibata, Chiemi Ishiyama, Kaoru Masuda, Yakichi Higo.

Language

English

Journal/Book name

Japanese:
English:	Microelectronics Engineering

Volume, Number, Page

Vol. 86 pp. 1179-1182

Published date

May 2009

Publisher

Japanese:
English:	ELSEVIER

Conference name

Japanese:
English:

Conference site

Japanese:
English: